================================================================== Calculation using SRIM-2006 SRIM version ---> SRIM-2006.02 Calc. date ---> February 24, 2007 ================================================================== Disk File Name = SRIM Outputs\Silicon in GaAs Ion = Silicon [14] , Mass = 27.977 amu Target Density = 5.3200E+00 g/cm3 = 4.4298E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Ga 31 050.00 048.20 As 33 050.00 051.80 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 1.923E-01 7.171E-01 120 A 96 A 73 A 11.00 keV 2.017E-01 7.260E-01 129 A 103 A 78 A 12.00 keV 2.107E-01 7.335E-01 139 A 109 A 82 A 13.00 keV 2.193E-01 7.398E-01 148 A 116 A 87 A 14.00 keV 2.275E-01 7.451E-01 157 A 122 A 91 A 15.00 keV 2.355E-01 7.495E-01 166 A 129 A 96 A 16.00 keV 2.433E-01 7.532E-01 176 A 135 A 100 A 17.00 keV 2.507E-01 7.563E-01 185 A 141 A 104 A 18.00 keV 2.580E-01 7.588E-01 194 A 148 A 109 A 20.00 keV 2.720E-01 7.625E-01 212 A 160 A 117 A 22.50 keV 2.885E-01 7.651E-01 234 A 174 A 127 A 25.00 keV 3.041E-01 7.660E-01 257 A 189 A 138 A 27.50 keV 3.189E-01 7.655E-01 279 A 203 A 148 A 30.00 keV 3.331E-01 7.641E-01 302 A 217 A 158 A 32.50 keV 3.467E-01 7.619E-01 324 A 230 A 168 A 35.00 keV 3.598E-01 7.591E-01 347 A 244 A 178 A 37.50 keV 3.724E-01 7.559E-01 370 A 257 A 188 A 40.00 keV 3.846E-01 7.522E-01 392 A 270 A 197 A 45.00 keV 4.079E-01 7.442E-01 438 A 296 A 217 A 50.00 keV 4.300E-01 7.354E-01 483 A 321 A 235 A 55.00 keV 4.510E-01 7.262E-01 529 A 347 A 254 A 60.00 keV 4.660E-01 7.167E-01 575 A 371 A 272 A 65.00 keV 4.830E-01 7.072E-01 621 A 396 A 291 A 70.00 keV 5.019E-01 6.977E-01 668 A 420 A 309 A 80.00 keV 5.410E-01 6.791E-01 761 A 467 A 345 A 90.00 keV 5.784E-01 6.610E-01 855 A 512 A 381 A 100.00 keV 6.125E-01 6.438E-01 949 A 556 A 415 A 110.00 keV 6.432E-01 6.273E-01 1043 A 599 A 450 A 120.00 keV 6.706E-01 6.117E-01 1137 A 641 A 483 A 130.00 keV 6.952E-01 5.969E-01 1232 A 683 A 517 A 140.00 keV 7.175E-01 5.828E-01 1328 A 723 A 550 A 150.00 keV 7.380E-01 5.695E-01 1424 A 763 A 582 A 160.00 keV 7.570E-01 5.568E-01 1520 A 802 A 614 A 170.00 keV 7.749E-01 5.447E-01 1617 A 841 A 646 A 180.00 keV 7.920E-01 5.333E-01 1715 A 879 A 678 A 200.00 keV 8.246E-01 5.119E-01 1911 A 952 A 741 A 225.00 keV 8.638E-01 4.879E-01 2159 A 1041 A 818 A 250.00 keV 9.027E-01 4.664E-01 2407 A 1127 A 894 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 5.3198E+01 eV / Angstrom 5.3198E+02 keV / micron 5.3198E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 1.2009E+02 eV / (1E15 atoms/cm2) 4.5270E-01 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2006 by J.P. Biersack and J.F. Ziegler