================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.26 Calc. date ---> May 11, 2006 ================================================================== Disk File Name = SRIM Outputs\Phosphorus in GaAs Ion = Phosphorus [15] , Mass = 30.974 amu Target Density = 5.3200E+00 g/cm3 = 4.4298E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Ga 31 050.00 048.20 As 33 050.00 051.80 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 1.634E-01 8.077E-01 116 A 91 A 69 A 11.00 keV 1.714E-01 8.188E-01 125 A 97 A 73 A 12.00 keV 1.790E-01 8.282E-01 134 A 103 A 78 A 13.00 keV 1.863E-01 8.363E-01 143 A 109 A 82 A 14.00 keV 1.933E-01 8.432E-01 152 A 115 A 86 A 15.00 keV 2.001E-01 8.490E-01 160 A 121 A 90 A 16.00 keV 2.067E-01 8.541E-01 169 A 127 A 95 A 17.00 keV 2.130E-01 8.584E-01 178 A 133 A 99 A 18.00 keV 2.192E-01 8.620E-01 186 A 139 A 103 A 20.00 keV 2.311E-01 8.677E-01 204 A 151 A 110 A 22.50 keV 2.451E-01 8.723E-01 225 A 165 A 120 A 25.00 keV 2.584E-01 8.749E-01 247 A 179 A 130 A 27.50 keV 2.710E-01 8.758E-01 268 A 192 A 139 A 30.00 keV 2.830E-01 8.756E-01 290 A 206 A 149 A 32.50 keV 2.946E-01 8.744E-01 311 A 219 A 158 A 35.00 keV 3.057E-01 8.724E-01 333 A 232 A 168 A 37.50 keV 3.164E-01 8.698E-01 355 A 244 A 177 A 40.00 keV 3.268E-01 8.667E-01 376 A 257 A 186 A 45.00 keV 3.466E-01 8.593E-01 420 A 282 A 204 A 50.00 keV 3.654E-01 8.510E-01 464 A 307 A 222 A 55.00 keV 3.832E-01 8.420E-01 508 A 332 A 240 A 60.00 keV 4.002E-01 8.325E-01 552 A 356 A 258 A 65.00 keV 4.150E-01 8.229E-01 596 A 380 A 275 A 70.00 keV 4.310E-01 8.131E-01 641 A 404 A 293 A 80.00 keV 4.676E-01 7.936E-01 731 A 449 A 328 A 90.00 keV 5.059E-01 7.745E-01 821 A 494 A 362 A 100.00 keV 5.435E-01 7.559E-01 911 A 538 A 396 A 110.00 keV 5.793E-01 7.381E-01 1002 A 580 A 429 A 120.00 keV 6.131E-01 7.211E-01 1092 A 621 A 462 A 130.00 keV 6.448E-01 7.048E-01 1182 A 662 A 495 A 140.00 keV 6.745E-01 6.893E-01 1272 A 701 A 526 A 150.00 keV 7.025E-01 6.745E-01 1363 A 739 A 558 A 160.00 keV 7.290E-01 6.603E-01 1453 A 777 A 589 A 170.00 keV 7.541E-01 6.468E-01 1544 A 814 A 619 A 180.00 keV 7.781E-01 6.339E-01 1635 A 850 A 649 A 200.00 keV 8.231E-01 6.099E-01 1817 A 920 A 709 A 225.00 keV 8.755E-01 5.826E-01 2045 A 1003 A 781 A 250.00 keV 9.247E-01 5.580E-01 2272 A 1083 A 852 A 275.00 keV 9.718E-01 5.357E-01 2500 A 1160 A 921 A 300.00 keV 1.018E+00 5.154E-01 2727 A 1233 A 988 A 325.00 keV 1.062E+00 4.969E-01 2952 A 1303 A 1053 A 350.00 keV 1.106E+00 4.798E-01 3177 A 1371 A 1117 A 375.00 keV 1.149E+00 4.641E-01 3400 A 1435 A 1179 A 400.00 keV 1.192E+00 4.496E-01 3621 A 1497 A 1240 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 5.3198E+01 eV / Angstrom 5.3198E+02 keV / micron 5.3198E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 1.2009E+02 eV / (1E15 atoms/cm2) 3.9641E-01 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler