==================================================================
              Calculation using SRIM-2003 
              SRIM version ---> SRIM-2003.20
              Calc. date   ---> July 19, 2004 
 ==================================================================

 Disk File Name = SRIM Outputs\Indium in Silicon

 Ion = Indium [49] , Mass = 114.904 amu

 Target Density =  2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3
 ======= Target  Composition ========
    Atom   Atom   Atomic    Mass     
    Name   Numb   Percent   Percent  
    ----   ----   -------   -------  
     Si     14    100.00    100.00   
 ====================================
 Bragg Correction = 0.00%
 Stopping Units =  MeV / (mg/cm2) 
 See bottom of Table for other Stopping units 

   Ion        dE/dx      dE/dx     Projected  Longitudinal   Lateral
  Energy      Elec.      Nuclear     Range     Straggling   Straggling
-----------  ---------- ---------- ----------  ----------  ----------
  10.00 keV   2.523E-01  5.064E+00     119 A        39 A        30 A   
  11.00 keV   2.646E-01  5.222E+00     126 A        41 A        31 A   
  12.00 keV   2.764E-01  5.366E+00     133 A        43 A        33 A   
  13.00 keV   2.877E-01  5.498E+00     139 A        45 A        34 A   
  14.00 keV   2.985E-01  5.621E+00     145 A        46 A        35 A   
  15.00 keV   3.090E-01  5.735E+00     151 A        48 A        37 A   
  16.00 keV   3.191E-01  5.841E+00     157 A        50 A        38 A   
  17.00 keV   3.290E-01  5.940E+00     163 A        51 A        39 A   
  18.00 keV   3.385E-01  6.033E+00     169 A        53 A        40 A   
  20.00 keV   3.568E-01  6.204E+00     180 A        56 A        43 A   
  22.50 keV   3.784E-01  6.391E+00     194 A        59 A        46 A   
  25.00 keV   3.989E-01  6.556E+00     207 A        62 A        49 A   
  27.50 keV   4.184E-01  6.702E+00     220 A        66 A        51 A   
  30.00 keV   4.370E-01  6.832E+00     233 A        69 A        54 A   
  32.50 keV   4.548E-01  6.949E+00     245 A        72 A        57 A   
  35.00 keV   4.720E-01  7.055E+00     258 A        75 A        59 A   
  37.50 keV   4.886E-01  7.151E+00     270 A        78 A        62 A   
  40.00 keV   5.046E-01  7.238E+00     282 A        81 A        64 A   
  45.00 keV   5.352E-01  7.391E+00     306 A        87 A        69 A   
  50.00 keV   5.642E-01  7.519E+00     329 A        92 A        74 A   
  55.00 keV   5.917E-01  7.629E+00     352 A        98 A        78 A   
  60.00 keV   6.180E-01  7.722E+00     374 A       103 A        82 A   
  65.00 keV   6.432E-01  7.803E+00     397 A       108 A        87 A   
  70.00 keV   6.675E-01  7.872E+00     419 A       113 A        91 A   
  80.00 keV   7.136E-01  7.984E+00     463 A       123 A        99 A   
  90.00 keV   7.569E-01  8.067E+00     506 A       133 A       107 A   
 100.00 keV   7.978E-01  8.128E+00     548 A       143 A       115 A   
 110.00 keV   8.368E-01  8.173E+00     591 A       152 A       123 A   
 120.00 keV   8.740E-01  8.203E+00     633 A       161 A       131 A   
 130.00 keV   9.097E-01  8.223E+00     675 A       171 A       138 A   
 140.00 keV   9.440E-01  8.234E+00     717 A       180 A       146 A   
 150.00 keV   9.771E-01  8.238E+00     758 A       189 A       153 A   
 160.00 keV   1.009E+00  8.235E+00     800 A       198 A       160 A   
 170.00 keV   1.040E+00  8.227E+00     841 A       206 A       168 A   
 180.00 keV   1.070E+00  8.215E+00     883 A       215 A       175 A   
 200.00 keV   1.128E+00  8.181E+00     966 A       233 A       189 A   
-----------------------------------------------------------
 Multiply Stopping by        for Stopping Units
 -------------------        ------------------
  2.3211E+01                 eV / Angstrom 
  2.3211E+02                keV / micron   
  2.3211E+02                MeV / mm       
  1.0000E+00                keV / (ug/cm2) 
  1.0000E+00                MeV / (mg/cm2) 
  1.0000E+03                keV / (mg/cm2) 
  4.6637E+01                 eV / (1E15 atoms/cm2)
  4.3810E-02                L.S.S. reduced units
 ==================================================================
 (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler