================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.20 Calc. date ---> July 19, 2004 ================================================================== Disk File Name = SRIM Outputs\Hydrogen in Silicon Ion = Hydrogen [1] , Mass = 1.008 amu Target Density = 2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 100.00 100.00 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 5.00 keV 2.314E-01 6.078E-03 743 A 392 A 340 A 5.50 keV 2.412E-01 5.806E-03 807 A 408 A 358 A 6.00 keV 2.503E-01 5.561E-03 870 A 424 A 375 A 6.50 keV 2.589E-01 5.340E-03 932 A 439 A 391 A 7.00 keV 2.671E-01 5.138E-03 994 A 452 A 407 A 8.00 keV 2.829E-01 4.784E-03 1113 A 477 A 436 A 9.00 keV 2.981E-01 4.482E-03 1229 A 499 A 463 A 10.00 keV 3.131E-01 4.222E-03 1342 A 519 A 488 A 11.00 keV 3.277E-01 3.995E-03 1452 A 538 A 511 A 12.00 keV 3.419E-01 3.794E-03 1558 A 554 A 532 A 13.00 keV 3.556E-01 3.615E-03 1662 A 569 A 552 A 14.00 keV 3.688E-01 3.455E-03 1762 A 583 A 571 A 15.00 keV 3.813E-01 3.310E-03 1861 A 596 A 589 A 16.00 keV 3.933E-01 3.179E-03 1957 A 608 A 605 A 17.00 keV 4.046E-01 3.059E-03 2051 A 619 A 621 A 18.00 keV 4.152E-01 2.949E-03 2143 A 629 A 636 A 20.00 keV 4.346E-01 2.755E-03 2323 A 648 A 664 A 22.50 keV 4.556E-01 2.549E-03 2540 A 669 A 696 A 25.00 keV 4.732E-01 2.375E-03 2751 A 688 A 726 A 27.50 keV 4.878E-01 2.226E-03 2956 A 704 A 752 A 30.00 keV 4.999E-01 2.097E-03 3157 A 720 A 778 A 32.50 keV 5.097E-01 1.984E-03 3355 A 734 A 801 A 35.00 keV 5.177E-01 1.883E-03 3550 A 747 A 824 A 37.50 keV 5.240E-01 1.794E-03 3744 A 759 A 845 A 40.00 keV 5.289E-01 1.713E-03 3937 A 771 A 866 A 45.00 keV 5.352E-01 1.575E-03 4320 A 793 A 905 A 50.00 keV 5.380E-01 1.459E-03 4701 A 814 A 942 A 55.00 keV 5.382E-01 1.360E-03 5084 A 833 A 977 A 60.00 keV 5.365E-01 1.276E-03 5468 A 852 A 1011 A 65.00 keV 5.334E-01 1.202E-03 5855 A 869 A 1044 A 70.00 keV 5.293E-01 1.137E-03 6246 A 886 A 1077 A 80.00 keV 5.192E-01 1.028E-03 7041 A 922 A 1140 A 90.00 keV 5.077E-01 9.403E-04 7856 A 957 A 1203 A 100.00 keV 4.957E-01 8.673E-04 8692 A 991 A 1265 A 110.00 keV 4.836E-01 8.057E-04 9550 A 1024 A 1326 A 120.00 keV 4.717E-01 7.531E-04 1.04 um 1058 A 1388 A 130.00 keV 4.603E-01 7.075E-04 1.13 um 1091 A 1451 A 140.00 keV 4.492E-01 6.675E-04 1.23 um 1124 A 1513 A 150.00 keV 4.387E-01 6.322E-04 1.32 um 1158 A 1577 A 160.00 keV 4.286E-01 6.008E-04 1.42 um 1192 A 1641 A 170.00 keV 4.190E-01 5.726E-04 1.52 um 1226 A 1706 A 180.00 keV 4.099E-01 5.471E-04 1.62 um 1261 A 1772 A 200.00 keV 3.930E-01 5.030E-04 1.83 um 1347 A 1907 A 225.00 keV 3.741E-01 4.576E-04 2.11 um 1466 A 2081 A 250.00 keV 3.573E-01 4.203E-04 2.40 um 1587 A 2261 A 275.00 keV 3.423E-01 3.890E-04 2.70 um 1710 A 2447 A 300.00 keV 3.288E-01 3.624E-04 3.02 um 1835 A 2638 A 325.00 keV 3.166E-01 3.395E-04 3.35 um 1961 A 2836 A 350.00 keV 3.055E-01 3.194E-04 3.69 um 2089 A 3039 A 375.00 keV 2.954E-01 3.018E-04 4.05 um 2219 A 3248 A 400.00 keV 2.861E-01 2.862E-04 4.41 um 2351 A 3463 A 450.00 keV 2.696E-01 2.596E-04 5.18 um 2727 A 3908 A 500.00 keV 2.554E-01 2.379E-04 5.99 um 3098 A 4373 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 2.3211E+01 eV / Angstrom 2.3211E+02 keV / micron 2.3211E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 4.6637E+01 eV / (1E15 atoms/cm2) 2.9650E+01 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler