================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.20 Calc. date ---> July 19, 2004 ================================================================== Disk File Name = SRIM Outputs\Helium in Silicon Ion = Helium [2] , Mass = 4.003 amu Target Density = 2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 100.00 100.00 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 2.310E-01 4.434E-02 1040 A 605 A 502 A 11.00 keV 2.421E-01 4.246E-02 1141 A 642 A 536 A 12.00 keV 2.526E-01 4.076E-02 1240 A 676 A 569 A 13.00 keV 2.628E-01 3.922E-02 1338 A 708 A 601 A 14.00 keV 2.730E-01 3.780E-02 1436 A 739 A 632 A 15.00 keV 2.831E-01 3.651E-02 1532 A 768 A 662 A 16.00 keV 2.933E-01 3.531E-02 1627 A 795 A 690 A 17.00 keV 3.035E-01 3.420E-02 1721 A 821 A 718 A 18.00 keV 3.138E-01 3.317E-02 1813 A 846 A 744 A 20.00 keV 3.343E-01 3.131E-02 1994 A 891 A 794 A 22.50 keV 3.596E-01 2.931E-02 2212 A 943 A 852 A 25.00 keV 3.843E-01 2.758E-02 2422 A 988 A 905 A 27.50 keV 4.082E-01 2.608E-02 2625 A 1029 A 953 A 30.00 keV 4.315E-01 2.475E-02 2820 A 1065 A 998 A 32.50 keV 4.540E-01 2.357E-02 3010 A 1099 A 1040 A 35.00 keV 4.758E-01 2.251E-02 3193 A 1129 A 1078 A 37.50 keV 4.970E-01 2.156E-02 3372 A 1156 A 1114 A 40.00 keV 5.176E-01 2.069E-02 3545 A 1182 A 1148 A 45.00 keV 5.570E-01 1.918E-02 3878 A 1227 A 1210 A 50.00 keV 5.945E-01 1.790E-02 4194 A 1266 A 1265 A 55.00 keV 6.301E-01 1.680E-02 4497 A 1300 A 1314 A 60.00 keV 6.641E-01 1.585E-02 4788 A 1330 A 1359 A 65.00 keV 6.965E-01 1.501E-02 5067 A 1357 A 1400 A 70.00 keV 7.275E-01 1.426E-02 5336 A 1382 A 1438 A 80.00 keV 7.856E-01 1.300E-02 5850 A 1424 A 1505 A 90.00 keV 8.390E-01 1.196E-02 6335 A 1459 A 1564 A 100.00 keV 8.883E-01 1.109E-02 6795 A 1490 A 1616 A 110.00 keV 9.339E-01 1.036E-02 7236 A 1516 A 1662 A 120.00 keV 9.760E-01 9.721E-03 7658 A 1539 A 1704 A 130.00 keV 1.015E+00 9.167E-03 8066 A 1560 A 1742 A 140.00 keV 1.051E+00 8.679E-03 8462 A 1578 A 1777 A 150.00 keV 1.085E+00 8.246E-03 8845 A 1595 A 1809 A 160.00 keV 1.116E+00 7.858E-03 9219 A 1611 A 1839 A 170.00 keV 1.145E+00 7.508E-03 9584 A 1625 A 1867 A 180.00 keV 1.172E+00 7.191E-03 9942 A 1638 A 1894 A 200.00 keV 1.219E+00 6.639E-03 1.06 um 1663 A 1942 A 225.00 keV 1.270E+00 6.067E-03 1.15 um 1691 A 1996 A 250.00 keV 1.311E+00 5.594E-03 1.23 um 1715 A 2045 A 275.00 keV 1.345E+00 5.196E-03 1.31 um 1737 A 2089 A 300.00 keV 1.373E+00 4.855E-03 1.39 um 1757 A 2130 A 325.00 keV 1.395E+00 4.560E-03 1.46 um 1776 A 2168 A 350.00 keV 1.413E+00 4.301E-03 1.54 um 1793 A 2204 A 375.00 keV 1.426E+00 4.073E-03 1.61 um 1809 A 2238 A 400.00 keV 1.436E+00 3.870E-03 1.69 um 1824 A 2271 A 450.00 keV 1.448E+00 3.523E-03 1.83 um 1859 A 2332 A 500.00 keV 1.452E+00 3.238E-03 1.98 um 1891 A 2389 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 2.3211E+01 eV / Angstrom 2.3211E+02 keV / micron 2.3211E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 4.6637E+01 eV / (1E15 atoms/cm2) 4.2914E+00 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler