================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.20 Calc. date ---> July 20, 2004 ================================================================== Ion = Boron [5] , Mass = 11.009 amu Target Density = 2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 100.00 100.00 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 99.9999 eV 3.912E-02 1.799E-01 12 A 12 A 9 A 110 eV 4.103E-02 1.867E-01 13 A 12 A 10 A 120 eV 4.285E-02 1.929E-01 14 A 13 A 10 A 130 eV 4.460E-02 1.987E-01 14 A 14 A 10 A 139.999 eV 4.628E-02 2.042E-01 15 A 14 A 11 A 149.999 eV 4.791E-02 2.093E-01 16 A 15 A 11 A 159.999 eV 4.948E-02 2.142E-01 16 A 15 A 12 A 169.999 eV 5.100E-02 2.187E-01 17 A 16 A 12 A 179.999 eV 5.248E-02 2.231E-01 18 A 16 A 12 A 199.999 eV 5.532E-02 2.311E-01 19 A 17 A 13 A 224.999 eV 5.867E-02 2.401E-01 20 A 18 A 14 A 249.999 eV 6.185E-02 2.483E-01 22 A 19 A 15 A 274.999 eV 6.487E-02 2.556E-01 23 A 20 A 16 A 299.999 eV 6.775E-02 2.623E-01 24 A 21 A 16 A 324.999 eV 7.052E-02 2.685E-01 26 A 22 A 17 A 349.999 eV 7.318E-02 2.742E-01 27 A 23 A 18 A 374.999 eV 7.575E-02 2.794E-01 28 A 24 A 19 A 399.999 eV 7.823E-02 2.843E-01 29 A 25 A 19 A 449.999 eV 8.298E-02 2.932E-01 32 A 27 A 21 A 499.999 eV 8.747E-02 3.009E-01 34 A 29 A 22 A 549.999 eV 9.174E-02 3.079E-01 37 A 31 A 23 A 599.999 eV 9.581E-02 3.140E-01 39 A 32 A 25 A 649.999 eV 9.973E-02 3.196E-01 41 A 34 A 26 A 699.999 eV 1.035E-01 3.246E-01 43 A 36 A 27 A 799.999 eV 1.106E-01 3.334E-01 48 A 39 A 29 A 899.999 eV 1.173E-01 3.407E-01 52 A 42 A 31 A 999.999 eV 1.237E-01 3.470E-01 56 A 45 A 34 A 1.10 keV 1.297E-01 3.523E-01 61 A 48 A 36 A 1.20 keV 1.355E-01 3.569E-01 65 A 51 A 38 A 1.30 keV 1.410E-01 3.608E-01 69 A 54 A 40 A 1.40 keV 1.464E-01 3.643E-01 73 A 57 A 42 A 1.50 keV 1.515E-01 3.673E-01 77 A 59 A 44 A 1.60 keV 1.565E-01 3.699E-01 81 A 62 A 46 A 1.70 keV 1.613E-01 3.722E-01 85 A 65 A 47 A 1.80 keV 1.660E-01 3.742E-01 89 A 67 A 49 A 2.00 keV 1.749E-01 3.774E-01 97 A 72 A 53 A 2.25 keV 1.855E-01 3.803E-01 107 A 78 A 58 A 2.50 keV 1.956E-01 3.823E-01 117 A 84 A 62 A 2.75 keV 2.051E-01 3.835E-01 126 A 90 A 66 A 3.00 keV 2.142E-01 3.841E-01 136 A 96 A 71 A 3.25 keV 2.230E-01 3.843E-01 145 A 102 A 75 A 3.50 keV 2.314E-01 3.840E-01 155 A 107 A 79 A 3.75 keV 2.395E-01 3.835E-01 164 A 113 A 83 A 4.00 keV 2.474E-01 3.827E-01 174 A 118 A 87 A 4.50 keV 2.624E-01 3.806E-01 193 A 129 A 95 A 5.00 keV 2.766E-01 3.779E-01 212 A 139 A 103 A 5.50 keV 2.901E-01 3.747E-01 231 A 149 A 110 A 6.00 keV 3.030E-01 3.714E-01 250 A 159 A 118 A 6.50 keV 3.154E-01 3.678E-01 268 A 168 A 125 A 7.00 keV 3.273E-01 3.642E-01 287 A 178 A 132 A 8.00 keV 3.499E-01 3.567E-01 325 A 196 A 146 A 9.00 keV 3.711E-01 3.492E-01 362 A 214 A 160 A 10.00 keV 3.912E-01 3.418E-01 400 A 231 A 173 A