================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.20 Calc. date ---> July 24, 2004 ================================================================== Ion = Boron [5] , Mass = 11.009 amu Target Density = 2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 100.00 100.00 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 3.912E-01 3.418E-01 400 A 231 A 173 A 11.00 keV 4.103E-01 3.346E-01 437 A 248 A 187 A 12.00 keV 4.285E-01 3.277E-01 475 A 264 A 200 A 13.00 keV 4.460E-01 3.210E-01 512 A 280 A 212 A 14.00 keV 4.628E-01 3.145E-01 549 A 295 A 225 A 15.00 keV 4.791E-01 3.083E-01 587 A 310 A 237 A 16.00 keV 4.948E-01 3.024E-01 624 A 324 A 249 A 17.00 keV 5.100E-01 2.967E-01 661 A 338 A 261 A 18.00 keV 5.248E-01 2.912E-01 698 A 352 A 272 A 20.00 keV 5.532E-01 2.809E-01 771 A 379 A 295 A 22.50 keV 5.910E-01 2.691E-01 863 A 410 A 323 A 25.00 keV 6.449E-01 2.584E-01 952 A 439 A 350 A 27.50 keV 6.955E-01 2.487E-01 1038 A 465 A 375 A 30.00 keV 7.417E-01 2.398E-01 1122 A 490 A 399 A 32.50 keV 7.834E-01 2.316E-01 1204 A 512 A 422 A 35.00 keV 8.210E-01 2.240E-01 1284 A 534 A 444 A 37.50 keV 8.551E-01 2.170E-01 1364 A 554 A 464 A 40.00 keV 8.860E-01 2.105E-01 1442 A 573 A 484 A 45.00 keV 9.407E-01 1.988E-01 1595 A 609 A 522 A 50.00 keV 9.874E-01 1.885E-01 1746 A 642 A 557 A 55.00 keV 1.028E+00 1.794E-01 1895 A 673 A 591 A 60.00 keV 1.063E+00 1.713E-01 2042 A 701 A 622 A 65.00 keV 1.094E+00 1.639E-01 2188 A 728 A 653 A 70.00 keV 1.121E+00 1.573E-01 2332 A 754 A 681 A 80.00 keV 1.169E+00 1.458E-01 2618 A 802 A 736 A 90.00 keV 1.211E+00 1.361E-01 2901 A 845 A 788 A 100.00 keV 1.249E+00 1.278E-01 3180 A 886 A 837 A 110.00 keV 1.286E+00 1.205E-01 3455 A 923 A 883 A 120.00 keV 1.323E+00 1.142E-01 3727 A 958 A 927 A 130.00 keV 1.359E+00 1.085E-01 3995 A 991 A 969 A 140.00 keV 1.396E+00 1.035E-01 4259 A 1021 A 1009 A 150.00 keV 1.434E+00 9.901E-02 4519 A 1050 A 1047 A 160.00 keV 1.472E+00 9.492E-02 4774 A 1076 A 1084 A 170.00 keV 1.511E+00 9.120E-02 5025 A 1101 A 1119 A 180.00 keV 1.550E+00 8.780E-02 5271 A 1125 A 1152 A 200.00 keV 1.631E+00 8.179E-02 5749 A 1169 A 1215 A 225.00 keV 1.733E+00 7.547E-02 6322 A 1218 A 1287 A 250.00 keV 1.837E+00 7.017E-02 6868 A 1260 A 1352 A 275.00 keV 1.941E+00 6.564E-02 7389 A 1297 A 1411 A 300.00 keV 2.043E+00 6.172E-02 7888 A 1329 A 1464 A 325.00 keV 2.145E+00 5.830E-02 8365 A 1359 A 1513 A 350.00 keV 2.243E+00 5.527E-02 8824 A 1385 A 1558 A 375.00 keV 2.340E+00 5.258E-02 9265 A 1408 A 1600 A 400.00 keV 2.433E+00 5.016E-02 9690 A 1429 A 1638 A 450.00 keV 2.610E+00 4.601E-02 1.05 um 1468 A 1707 A 500.00 keV 2.774E+00 4.255E-02 1.13 um 1501 A 1767 A