================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.26 Calc. date ---> May 11, 2006 ================================================================== Disk File Name = SRIM Outputs\Boron in GaAs Ion = Boron [5] , Mass = 11.009 amu Target Density = 5.3200E+00 g/cm3 = 4.4298E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Ga 31 050.00 048.20 As 33 050.00 051.80 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 1.638E-01 1.414E-01 263 A 250 A 188 A 11.00 keV 1.718E-01 1.404E-01 287 A 268 A 202 A 12.00 keV 1.794E-01 1.393E-01 311 A 286 A 216 A 13.00 keV 1.868E-01 1.381E-01 335 A 303 A 229 A 14.00 keV 1.938E-01 1.368E-01 359 A 320 A 242 A 15.00 keV 2.006E-01 1.355E-01 383 A 337 A 255 A 16.00 keV 2.072E-01 1.342E-01 408 A 353 A 268 A 17.00 keV 2.136E-01 1.329E-01 432 A 369 A 281 A 18.00 keV 2.198E-01 1.315E-01 456 A 385 A 293 A 20.00 keV 2.317E-01 1.289E-01 505 A 415 A 318 A 22.50 keV 2.452E-01 1.257E-01 566 A 452 A 348 A 25.00 keV 2.588E-01 1.226E-01 627 A 488 A 377 A 27.50 keV 2.745E-01 1.196E-01 688 A 522 A 406 A 30.00 keV 2.910E-01 1.168E-01 749 A 555 A 433 A 32.50 keV 3.076E-01 1.141E-01 809 A 587 A 460 A 35.00 keV 3.238E-01 1.115E-01 868 A 617 A 486 A 37.50 keV 3.394E-01 1.091E-01 926 A 645 A 511 A 40.00 keV 3.543E-01 1.067E-01 984 A 673 A 535 A 45.00 keV 3.818E-01 1.024E-01 1099 A 725 A 581 A 50.00 keV 4.063E-01 9.843E-02 1212 A 773 A 625 A 55.00 keV 4.281E-01 9.481E-02 1324 A 818 A 667 A 60.00 keV 4.476E-01 9.149E-02 1436 A 861 A 706 A 65.00 keV 4.652E-01 8.843E-02 1546 A 902 A 745 A 70.00 keV 4.813E-01 8.560E-02 1657 A 941 A 782 A 80.00 keV 5.098E-01 8.054E-02 1876 A 1014 A 852 A 90.00 keV 5.349E-01 7.613E-02 2094 A 1081 A 920 A 100.00 keV 5.576E-01 7.226E-02 2310 A 1144 A 983 A 110.00 keV 5.789E-01 6.882E-02 2524 A 1203 A 1044 A 120.00 keV 5.990E-01 6.575E-02 2737 A 1258 A 1103 A 130.00 keV 6.185E-01 6.299E-02 2948 A 1311 A 1159 A 140.00 keV 6.376E-01 6.048E-02 3157 A 1360 A 1214 A 150.00 keV 6.563E-01 5.819E-02 3363 A 1407 A 1266 A 160.00 keV 6.747E-01 5.610E-02 3567 A 1452 A 1316 A 170.00 keV 6.930E-01 5.418E-02 3769 A 1494 A 1365 A 180.00 keV 7.111E-01 5.241E-02 3969 A 1534 A 1412 A 200.00 keV 7.470E-01 4.923E-02 4360 A 1609 A 1502 A 225.00 keV 7.911E-01 4.584E-02 4836 A 1694 A 1605 A 250.00 keV 8.343E-01 4.294E-02 5296 A 1769 A 1701 A 275.00 keV 8.766E-01 4.044E-02 5742 A 1837 A 1789 A 300.00 keV 9.179E-01 3.825E-02 6174 A 1899 A 1872 A 325.00 keV 9.579E-01 3.631E-02 6593 A 1955 A 1948 A 350.00 keV 9.968E-01 3.459E-02 7001 A 2006 A 2020 A 375.00 keV 1.034E+00 3.304E-02 7397 A 2053 A 2087 A 400.00 keV 1.071E+00 3.165E-02 7783 A 2096 A 2150 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 5.3198E+01 eV / Angstrom 5.3198E+02 keV / micron 5.3198E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 1.2009E+02 eV / (1E15 atoms/cm2) 2.4211E+00 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler