==================================================================
              Calculation using SRIM-2003 
              SRIM version ---> SRIM-2003.26
              Calc. date   ---> April 24, 2006 
 ==================================================================

 Disk File Name = SRIM Outputs\Beryllium in Silicon

 Ion = Beryllium [4] , Mass = 9.012 amu

 Target Density =  2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3
 ======= Target  Composition ========
    Atom   Atom   Atomic    Mass     
    Name   Numb   Percent   Percent  
    ----   ----   -------   -------  
     Si     14    100.00    100.00   
 ====================================
 Bragg Correction = 0.00%
 Stopping Units =  MeV / (mg/cm2) 
 See bottom of Table for other Stopping units 

   Ion        dE/dx      dE/dx     Projected  Longitudinal   Lateral
  Energy      Elec.      Nuclear     Range     Straggling   Straggling
-----------  ---------- ---------- ----------  ----------  ----------
  20.00 keV   3.807E-01  1.770E-01    1077 A       554 A       440 A   
  22.50 keV   4.089E-01  1.685E-01    1209 A       600 A       483 A   
  25.00 keV   4.341E-01  1.609E-01    1339 A       644 A       524 A   
  27.50 keV   4.572E-01  1.540E-01    1467 A       685 A       564 A   
  30.00 keV   4.788E-01  1.478E-01    1595 A       723 A       602 A   
  32.50 keV   4.996E-01  1.422E-01    1721 A       760 A       638 A   
  35.00 keV   5.199E-01  1.370E-01    1846 A       795 A       673 A   
  37.50 keV   5.397E-01  1.323E-01    1970 A       828 A       707 A   
  40.00 keV   5.591E-01  1.280E-01    2092 A       860 A       740 A   
  45.00 keV   5.967E-01  1.202E-01    2332 A       918 A       802 A   
  50.00 keV   6.324E-01  1.134E-01    2566 A       972 A       860 A   
  55.00 keV   6.661E-01  1.075E-01    2795 A      1021 A       915 A   
  60.00 keV   6.980E-01  1.023E-01    3020 A      1066 A       967 A   
  65.00 keV   7.283E-01  9.761E-02    3239 A      1108 A      1016 A   
  70.00 keV   7.572E-01  9.340E-02    3454 A      1147 A      1062 A   
  80.00 keV   8.114E-01  8.613E-02    3873 A      1217 A      1148 A   
  90.00 keV   8.619E-01  8.006E-02    4277 A      1279 A      1227 A   
 100.00 keV   9.099E-01  7.489E-02    4668 A      1334 A      1298 A   
 110.00 keV   9.558E-01  7.043E-02    5046 A      1384 A      1365 A   
 120.00 keV   1.000E+00  6.654E-02    5413 A      1429 A      1426 A   
 130.00 keV   1.043E+00  6.311E-02    5770 A      1469 A      1483 A   
 140.00 keV   1.085E+00  6.006E-02    6116 A      1507 A      1537 A   
 150.00 keV   1.127E+00  5.732E-02    6453 A      1541 A      1587 A   
 160.00 keV   1.167E+00  5.486E-02    6781 A      1572 A      1633 A   
 170.00 keV   1.207E+00  5.262E-02    7101 A      1601 A      1678 A   
 180.00 keV   1.246E+00  5.058E-02    7412 A      1628 A      1719 A   
 200.00 keV   1.323E+00  4.700E-02    8014 A      1677 A      1796 A   
 225.00 keV   1.415E+00  4.324E-02    8727 A      1730 A      1881 A   
 250.00 keV   1.504E+00  4.011E-02    9404 A      1775 A      1957 A   
 275.00 keV   1.590E+00  3.744E-02    1.00 um     1815 A      2025 A   
 300.00 keV   1.673E+00  3.514E-02    1.07 um     1849 A      2086 A   
-----------------------------------------------------------
 Multiply Stopping by        for Stopping Units
 -------------------        ------------------
  2.3211E+01                 eV / Angstrom 
  2.3211E+02                keV / micron   
  2.3211E+02                MeV / mm       
  1.0000E+00                keV / (ug/cm2) 
  1.0000E+00                MeV / (mg/cm2) 
  1.0000E+03                keV / (mg/cm2) 
  4.6637E+01                 eV / (1E15 atoms/cm2)
  1.1692E+00                L.S.S. reduced units
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 (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler