================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.26 Calc. date ---> May 16, 2006 ================================================================== Disk File Name = SRIM Outputs\Beryllium in InP Ion = Beryllium [4] , Mass = 9.012 amu Target Density = 4.7900E+00 g/cm3 = 3.9570E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- In 49 050.00 078.76 P 15 050.00 021.24 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 1.078E-01 8.904E-02 390 A 399 A 301 A 11.00 keV 1.130E-01 8.774E-02 428 A 430 A 325 A 12.00 keV 1.180E-01 8.645E-02 465 A 460 A 349 A 13.00 keV 1.229E-01 8.518E-02 502 A 490 A 372 A 14.00 keV 1.275E-01 8.393E-02 540 A 519 A 395 A 15.00 keV 1.320E-01 8.272E-02 578 A 548 A 418 A 16.00 keV 1.363E-01 8.153E-02 616 A 576 A 440 A 17.00 keV 1.405E-01 8.038E-02 653 A 604 A 462 A 18.00 keV 1.446E-01 7.926E-02 692 A 632 A 484 A 20.00 keV 1.559E-01 7.712E-02 767 A 684 A 527 A 22.50 keV 1.654E-01 7.461E-02 862 A 747 A 579 A 25.00 keV 1.727E-01 7.229E-02 957 A 809 A 629 A 27.50 keV 1.798E-01 7.013E-02 1054 A 869 A 679 A 30.00 keV 1.875E-01 6.812E-02 1151 A 928 A 727 A 32.50 keV 1.959E-01 6.625E-02 1248 A 985 A 775 A 35.00 keV 2.049E-01 6.449E-02 1344 A 1039 A 821 A 37.50 keV 2.144E-01 6.285E-02 1440 A 1092 A 866 A 40.00 keV 2.242E-01 6.130E-02 1535 A 1143 A 910 A 45.00 keV 2.443E-01 5.847E-02 1723 A 1238 A 995 A 50.00 keV 2.647E-01 5.594E-02 1906 A 1325 A 1074 A 55.00 keV 2.851E-01 5.366E-02 2085 A 1406 A 1148 A 60.00 keV 3.051E-01 5.160E-02 2259 A 1481 A 1217 A 65.00 keV 3.247E-01 4.972E-02 2430 A 1551 A 1283 A 70.00 keV 3.437E-01 4.799E-02 2597 A 1616 A 1345 A 80.00 keV 3.799E-01 4.494E-02 2921 A 1733 A 1459 A 90.00 keV 4.137E-01 4.232E-02 3234 A 1836 A 1563 A 100.00 keV 4.450E-01 4.004E-02 3536 A 1928 A 1658 A 110.00 keV 4.741E-01 3.803E-02 3830 A 2011 A 1745 A 120.00 keV 5.013E-01 3.625E-02 4116 A 2087 A 1826 A 130.00 keV 5.267E-01 3.465E-02 4395 A 2156 A 1902 A 140.00 keV 5.506E-01 3.321E-02 4668 A 2220 A 1973 A 150.00 keV 5.730E-01 3.191E-02 4935 A 2279 A 2041 A 160.00 keV 5.943E-01 3.072E-02 5198 A 2334 A 2104 A 170.00 keV 6.144E-01 2.962E-02 5455 A 2386 A 2165 A 180.00 keV 6.336E-01 2.862E-02 5709 A 2434 A 2223 A 200.00 keV 6.695E-01 2.683E-02 6204 A 2523 A 2331 A 225.00 keV 7.105E-01 2.492E-02 6804 A 2621 A 2455 A 250.00 keV 7.480E-01 2.331E-02 7384 A 2708 A 2568 A 275.00 keV 7.829E-01 2.191E-02 7947 A 2786 A 2672 A 300.00 keV 8.155E-01 2.070E-02 8496 A 2856 A 2769 A 325.00 keV 8.463E-01 1.963E-02 9030 A 2920 A 2859 A 350.00 keV 8.755E-01 1.868E-02 9552 A 2979 A 2943 A 375.00 keV 9.036E-01 1.782E-02 1.01 um 3034 A 3023 A 400.00 keV 9.305E-01 1.706E-02 1.06 um 3084 A 3098 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 4.7898E+01 eV / Angstrom 4.7898E+02 keV / micron 4.7898E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 1.2105E+02 eV / (1E15 atoms/cm2) 3.6056E+00 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler