================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.26 Calc. date ---> May 11, 2006 ================================================================== Disk File Name = SRIM Outputs\Beryllium in GaAs Ion = Beryllium [4] , Mass = 9.012 amu Target Density = 5.3200E+00 g/cm3 = 4.4298E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Ga 31 050.00 048.20 As 33 050.00 051.80 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 20.00 keV 1.537E-01 8.298E-02 675 A 590 A 453 A 22.50 keV 1.614E-01 8.040E-02 763 A 646 A 499 A 25.00 keV 1.703E-01 7.797E-02 851 A 701 A 544 A 27.50 keV 1.798E-01 7.570E-02 940 A 753 A 588 A 30.00 keV 1.896E-01 7.356E-02 1028 A 804 A 631 A 32.50 keV 1.996E-01 7.156E-02 1116 A 853 A 672 A 35.00 keV 2.096E-01 6.967E-02 1203 A 900 A 713 A 37.50 keV 2.196E-01 6.790E-02 1289 A 945 A 752 A 40.00 keV 2.294E-01 6.623E-02 1375 A 988 A 790 A 45.00 keV 2.485E-01 6.315E-02 1545 A 1069 A 863 A 50.00 keV 2.669E-01 6.040E-02 1713 A 1144 A 932 A 55.00 keV 2.845E-01 5.791E-02 1878 A 1214 A 997 A 60.00 keV 3.012E-01 5.565E-02 2041 A 1279 A 1058 A 65.00 keV 3.173E-01 5.359E-02 2201 A 1340 A 1117 A 70.00 keV 3.326E-01 5.171E-02 2359 A 1398 A 1173 A 80.00 keV 3.613E-01 4.836E-02 2670 A 1503 A 1278 A 90.00 keV 3.879E-01 4.549E-02 2973 A 1597 A 1375 A 100.00 keV 4.126E-01 4.300E-02 3269 A 1683 A 1465 A 110.00 keV 4.357E-01 4.080E-02 3559 A 1761 A 1549 A 120.00 keV 4.575E-01 3.885E-02 3843 A 1833 A 1628 A 130.00 keV 4.782E-01 3.711E-02 4122 A 1899 A 1703 A 140.00 keV 4.979E-01 3.553E-02 4395 A 1961 A 1773 A 150.00 keV 5.167E-01 3.411E-02 4663 A 2018 A 1840 A 160.00 keV 5.348E-01 3.281E-02 4927 A 2071 A 1903 A 170.00 keV 5.523E-01 3.163E-02 5187 A 2122 A 1964 A 180.00 keV 5.692E-01 3.053E-02 5442 A 2169 A 2022 A 200.00 keV 6.014E-01 2.859E-02 5940 A 2255 A 2131 A 225.00 keV 6.392E-01 2.653E-02 6543 A 2352 A 2255 A 250.00 keV 6.749E-01 2.478E-02 7125 A 2437 A 2368 A 275.00 keV 7.087E-01 2.327E-02 7689 A 2513 A 2473 A 300.00 keV 7.409E-01 2.196E-02 8235 A 2581 A 2569 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 5.3198E+01 eV / Angstrom 5.3198E+02 keV / micron 5.3198E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 1.2009E+02 eV / (1E15 atoms/cm2) 3.5519E+00 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler