================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.20 Calc. date ---> July 24, 2004 ================================================================== Ion = Arsenic [33] , Mass = 74.92 amu Target Density = 2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 100.00 100.00 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 2.751E-01 4.062E+00 124 A 47 A 35 A 11.00 keV 2.886E-01 4.159E+00 131 A 49 A 37 A 12.00 keV 3.014E-01 4.245E+00 139 A 51 A 39 A 13.00 keV 3.137E-01 4.323E+00 146 A 54 A 41 A 14.00 keV 3.255E-01 4.394E+00 154 A 56 A 43 A 15.00 keV 3.370E-01 4.458E+00 161 A 58 A 45 A 16.00 keV 3.480E-01 4.518E+00 168 A 60 A 46 A 17.00 keV 3.587E-01 4.572E+00 175 A 63 A 48 A 18.00 keV 3.691E-01 4.622E+00 182 A 65 A 50 A 20.00 keV 3.891E-01 4.711E+00 196 A 69 A 53 A 22.50 keV 4.127E-01 4.805E+00 213 A 74 A 57 A 25.00 keV 4.350E-01 4.883E+00 230 A 79 A 61 A 27.50 keV 4.563E-01 4.949E+00 246 A 84 A 65 A 30.00 keV 4.765E-01 5.006E+00 262 A 89 A 68 A 32.50 keV 4.960E-01 5.053E+00 278 A 93 A 72 A 35.00 keV 5.147E-01 5.094E+00 294 A 98 A 76 A 37.50 keV 5.328E-01 5.129E+00 310 A 102 A 79 A 40.00 keV 5.503E-01 5.159E+00 326 A 107 A 83 A 45.00 keV 5.837E-01 5.205E+00 357 A 116 A 90 A 50.00 keV 6.152E-01 5.238E+00 388 A 124 A 96 A 55.00 keV 6.453E-01 5.261E+00 419 A 133 A 103 A 60.00 keV 6.739E-01 5.275E+00 449 A 141 A 109 A 65.00 keV 7.015E-01 5.282E+00 480 A 149 A 116 A 70.00 keV 7.279E-01 5.284E+00 510 A 158 A 122 A 80.00 keV 7.782E-01 5.275E+00 571 A 174 A 134 A 90.00 keV 8.254E-01 5.254E+00 631 A 190 A 146 A 100.00 keV 8.701E-01 5.224E+00 692 A 206 A 158 A 110.00 keV 9.125E-01 5.187E+00 753 A 221 A 170 A 120.00 keV 9.531E-01 5.147E+00 813 A 237 A 182 A 130.00 keV 9.920E-01 5.104E+00 875 A 252 A 194 A 140.00 keV 1.029E+00 5.059E+00 936 A 267 A 205 A 150.00 keV 1.067E+00 5.012E+00 997 A 282 A 217 A 160.00 keV 1.171E+00 4.965E+00 1059 A 297 A 228 A 170.00 keV 1.256E+00 4.917E+00 1120 A 312 A 239 A 180.00 keV 1.326E+00 4.869E+00 1181 A 326 A 251 A 200.00 keV 1.435E+00 4.774E+00 1303 A 355 A 273 A 225.00 keV 1.533E+00 4.657E+00 1456 A 389 A 301 A 250.00 keV 1.609E+00 4.544E+00 1610 A 424 A 328 A 275.00 keV 1.677E+00 4.436E+00 1766 A 458 A 355 A 300.00 keV 1.743E+00 4.332E+00 1924 A 491 A 382 A 325.00 keV 1.809E+00 4.234E+00 2082 A 525 A 409 A 350.00 keV 1.876E+00 4.139E+00 2243 A 557 A 436 A 375.00 keV 1.944E+00 4.049E+00 2404 A 590 A 462 A 400.00 keV 2.013E+00 3.964E+00 2566 A 622 A 489 A 450.00 keV 2.150E+00 3.804E+00 2892 A 685 A 542 A 500.00 keV 2.285E+00 3.659E+00 3221 A 746 A 595 A