================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.20 Calc. date ---> July 20, 2004 ================================================================== Disk File Name = SRIM Outputs\Arsenic in Silicon Ion = Arsenic [33] , Mass = 74.92 amu Target Density = 2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 100.00 100.00 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 499.999 eV 6.152E-02 1.296E+00 25 A 12 A 9 A 549.999 eV 6.453E-02 1.357E+00 26 A 12 A 9 A 599.999 eV 6.739E-02 1.416E+00 27 A 13 A 9 A 649.999 eV 7.015E-02 1.471E+00 28 A 13 A 9 A 699.999 eV 7.279E-02 1.523E+00 29 A 13 A 10 A 799.999 eV 7.782E-02 1.621E+00 31 A 14 A 10 A 899.999 eV 8.254E-02 1.710E+00 33 A 15 A 11 A 999.999 eV 8.701E-02 1.793E+00 35 A 16 A 11 A 1.10 keV 9.125E-02 1.871E+00 36 A 16 A 12 A 1.20 keV 9.531E-02 1.943E+00 38 A 17 A 12 A 1.30 keV 9.920E-02 2.012E+00 39 A 18 A 13 A 1.40 keV 1.029E-01 2.076E+00 41 A 18 A 13 A 1.50 keV 1.066E-01 2.137E+00 42 A 19 A 14 A 1.60 keV 1.101E-01 2.195E+00 44 A 19 A 14 A 1.70 keV 1.134E-01 2.250E+00 45 A 20 A 14 A 1.80 keV 1.167E-01 2.303E+00 46 A 20 A 15 A 2.00 keV 1.230E-01 2.402E+00 49 A 21 A 16 A 2.25 keV 1.305E-01 2.516E+00 52 A 22 A 16 A 2.50 keV 1.376E-01 2.619E+00 55 A 23 A 17 A 2.75 keV 1.443E-01 2.714E+00 58 A 25 A 18 A 3.00 keV 1.507E-01 2.802E+00 61 A 26 A 19 A 3.25 keV 1.569E-01 2.884E+00 64 A 27 A 20 A 3.50 keV 1.628E-01 2.960E+00 66 A 27 A 20 A 3.75 keV 1.685E-01 3.032E+00 69 A 28 A 21 A 4.00 keV 1.740E-01 3.099E+00 71 A 29 A 22 A 4.50 keV 1.846E-01 3.223E+00 76 A 31 A 23 A 5.00 keV 1.946E-01 3.334E+00 81 A 33 A 24 A 5.50 keV 2.040E-01 3.435E+00 86 A 34 A 26 A 6.00 keV 2.131E-01 3.528E+00 90 A 36 A 27 A 6.50 keV 2.218E-01 3.613E+00 95 A 37 A 28 A 7.00 keV 2.302E-01 3.691E+00 99 A 39 A 29 A 8.00 keV 2.461E-01 3.832E+00 107 A 41 A 31 A 9.00 keV 2.610E-01 3.954E+00 116 A 44 A 33 A 10.00 keV 2.751E-01 4.062E+00 124 A 47 A 35 A 11.00 keV 2.886E-01 4.159E+00 131 A 49 A 37 A 12.00 keV 3.014E-01 4.245E+00 139 A 51 A 39 A 13.00 keV 3.137E-01 4.323E+00 146 A 54 A 41 A 14.00 keV 3.255E-01 4.394E+00 154 A 56 A 43 A 15.00 keV 3.370E-01 4.458E+00 161 A 58 A 45 A 16.00 keV 3.480E-01 4.518E+00 168 A 60 A 46 A 17.00 keV 3.587E-01 4.572E+00 175 A 63 A 48 A 18.00 keV 3.691E-01 4.622E+00 182 A 65 A 50 A 20.00 keV 3.891E-01 4.711E+00 196 A 69 A 53 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 2.3211E+01 eV / Angstrom 2.3211E+02 keV / micron 2.3211E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 4.6637E+01 eV / (1E15 atoms/cm2) 6.5808E-02 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler