================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.20 Calc. date ---> July 24, 2004 ================================================================== Ion = Antimony [51] , Mass = 120.903 amu Target Density = 2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 100.00 100.00 ==================================== Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 20.00 keV 3.418E-01 6.340E+00 180 A 55 A 42 A 22.50 keV 3.625E-01 6.539E+00 193 A 58 A 45 A 25.00 keV 3.822E-01 6.714E+00 206 A 61 A 48 A 27.50 keV 4.008E-01 6.869E+00 219 A 65 A 50 A 30.00 keV 4.186E-01 7.008E+00 232 A 68 A 53 A 32.50 keV 4.357E-01 7.134E+00 244 A 71 A 56 A 35.00 keV 4.522E-01 7.247E+00 256 A 74 A 58 A 37.50 keV 4.680E-01 7.351E+00 268 A 76 A 60 A 40.00 keV 4.834E-01 7.445E+00 280 A 79 A 63 A 45.00 keV 5.127E-01 7.611E+00 303 A 85 A 67 A 50.00 keV 5.404E-01 7.752E+00 326 A 90 A 72 A 55.00 keV 5.668E-01 7.873E+00 349 A 95 A 76 A 60.00 keV 5.920E-01 7.977E+00 371 A 100 A 80 A 65.00 keV 6.162E-01 8.067E+00 392 A 105 A 85 A 70.00 keV 6.395E-01 8.146E+00 414 A 110 A 89 A 80.00 keV 6.836E-01 8.274E+00 457 A 120 A 97 A 90.00 keV 7.251E-01 8.372E+00 499 A 129 A 105 A 100.00 keV 7.643E-01 8.447E+00 540 A 138 A 112 A 110.00 keV 8.016E-01 8.503E+00 581 A 147 A 120 A 120.00 keV 8.373E-01 8.545E+00 622 A 156 A 127 A 130.00 keV 8.714E-01 8.575E+00 663 A 165 A 134 A 140.00 keV 9.043E-01 8.595E+00 703 A 174 A 141 A 150.00 keV 9.361E-01 8.607E+00 744 A 182 A 149 A 160.00 keV 9.668E-01 8.612E+00 784 A 191 A 155 A 170.00 keV 9.965E-01 8.612E+00 824 A 199 A 162 A 180.00 keV 1.025E+00 8.607E+00 864 A 207 A 169 A 200.00 keV 1.081E+00 8.584E+00 944 A 224 A 183 A