================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.20 Calc. date ---> July 19, 2004 ================================================================== Disk File Name = SRIM Outputs\Aluminum in Silicon Ion = Aluminum [13] , Mass = 26.982 amu Target Density = 2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 100.00 100.00 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 2.936E-01 1.559E+00 191 A 99 A 71 A 11.00 keV 3.079E-01 1.565E+00 207 A 106 A 76 A 12.00 keV 3.216E-01 1.567E+00 222 A 113 A 81 A 13.00 keV 3.348E-01 1.568E+00 238 A 120 A 86 A 14.00 keV 3.474E-01 1.568E+00 254 A 127 A 90 A 15.00 keV 3.596E-01 1.566E+00 269 A 133 A 95 A 16.00 keV 3.714E-01 1.563E+00 285 A 140 A 100 A 17.00 keV 3.828E-01 1.559E+00 301 A 147 A 105 A 18.00 keV 3.939E-01 1.555E+00 316 A 154 A 109 A 20.00 keV 4.152E-01 1.544E+00 348 A 167 A 118 A 22.50 keV 4.404E-01 1.528E+00 388 A 183 A 130 A 25.00 keV 4.642E-01 1.511E+00 427 A 199 A 141 A 27.50 keV 4.869E-01 1.493E+00 467 A 215 A 152 A 30.00 keV 5.085E-01 1.475E+00 507 A 231 A 163 A 32.50 keV 5.293E-01 1.456E+00 548 A 247 A 174 A 35.00 keV 5.493E-01 1.437E+00 588 A 262 A 184 A 37.50 keV 5.686E-01 1.418E+00 629 A 277 A 195 A 40.00 keV 5.872E-01 1.400E+00 670 A 293 A 206 A 45.00 keV 6.228E-01 1.363E+00 752 A 322 A 227 A 50.00 keV 6.565E-01 1.329E+00 836 A 352 A 249 A 55.00 keV 6.930E-01 1.295E+00 919 A 381 A 270 A 60.00 keV 7.433E-01 1.264E+00 1003 A 409 A 291 A 65.00 keV 7.895E-01 1.234E+00 1087 A 436 A 313 A 70.00 keV 8.316E-01 1.205E+00 1171 A 463 A 334 A 80.00 keV 9.047E-01 1.152E+00 1338 A 514 A 375 A 90.00 keV 9.665E-01 1.104E+00 1505 A 563 A 416 A 100.00 keV 1.021E+00 1.061E+00 1673 A 611 A 456 A 110.00 keV 1.071E+00 1.021E+00 1842 A 657 A 496 A 120.00 keV 1.117E+00 9.848E-01 2011 A 701 A 535 A 130.00 keV 1.161E+00 9.513E-01 2181 A 745 A 573 A 140.00 keV 1.203E+00 9.204E-01 2350 A 787 A 611 A 150.00 keV 1.243E+00 8.918E-01 2520 A 828 A 648 A 160.00 keV 1.282E+00 8.652E-01 2690 A 867 A 685 A 170.00 keV 1.320E+00 8.404E-01 2859 A 906 A 721 A 180.00 keV 1.357E+00 8.172E-01 3028 A 943 A 757 A 200.00 keV 1.429E+00 7.751E-01 3366 A 1015 A 827 A 225.00 keV 1.517E+00 7.292E-01 3784 A 1100 A 912 A 250.00 keV 1.604E+00 6.892E-01 4197 A 1179 A 994 A 275.00 keV 1.691E+00 6.540E-01 4605 A 1252 A 1072 A 300.00 keV 1.778E+00 6.228E-01 5006 A 1321 A 1148 A 325.00 keV 1.867E+00 5.948E-01 5399 A 1385 A 1221 A 350.00 keV 1.955E+00 5.697E-01 5785 A 1445 A 1290 A 375.00 keV 2.044E+00 5.469E-01 6163 A 1500 A 1357 A 400.00 keV 2.134E+00 5.261E-01 6533 A 1552 A 1421 A 450.00 keV 2.314E+00 4.895E-01 7249 A 1647 A 1541 A 500.00 keV 2.494E+00 4.584E-01 7933 A 1731 A 1650 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 2.3211E+01 eV / Angstrom 2.3211E+02 keV / micron 2.3211E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 4.6637E+01 eV / (1E15 atoms/cm2) 2.0811E-01 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler