Product Briefs

Disk Refurbishment Services 1.2 MB • May 2011

Research Papers

Wear and Ion Erosion in Spinning Disk Fences made With Al and Torlon 5.45 MB • August 2018

Elastomers for Control of Wafer Temperature in the ≈50℃ Range During High Dose Ion Implantation 494 KB • July 2014

Mass and Charge Overlaps in Beamline Implantation into Compound Semiconductor Materials 412 KB • July 2012

Advanced Process Control and Novel Test Methods for PVD Silicon and Elastomeric Silicone Coatings Utilized on Ion Implant Disks, Heatsinks and Selected Platens 570 KB • July 2012

Contamination Control in Ion Implantation – An Additional Approach 257 KB • June 2010

High Dose Hydrogen Implant Blistering Effects As a Function of Selected Implanter And Substrate Conditions 260 KB • June 2006

Ion Implanter Cross Contamination And Maintenance Safety Considerations With High Dose Phosphorus 260 KB • June 2006

An Extended Dose Metrology Tool For A Wide Range of Ion Implant Applications 195 KB • October 2004