Profile Code Software
Features & Benefits
Ion Implantation Modeling Using Profile Code
Profile Code is a PC-based software program which takes the guesswork out of ion implantation. It accurately calculates and plots ion implant concentration vs. depth profiles.
Profile Code can model the implantation of elements with atomic numbers from 1 to 92 into any elemental, compound, or mixed substrate. An expandable and programmable library stores all elemental substrates and up to 100 of the most frequently used compound and mixed substrates for recall. Profile Code easily calculates the depth profile for energies from 1 KeV to 5 MeV (50 MeV Gaussian) and any dose. Plot distribution profiles in a matter of seconds. Perform multiple implants and sum any or all of the resulting profiles to achieve uniform distributions. Save costly implanter and analysis time by modeling implants first. Profile Code output can be in the form of printed tabular data, an ASCII file, or presentation-ready graphics for printing on a dot matrix or laser printer.
Thermal Diffusion Module
This allows the user to model the affect of a thermal anneal cycle on a given distribution profile. Anneal cycle ramp up, ramp down, and constant temperature segments are dictated by the user.
High Dose Module
The High Dose Module models the effect of changing substrate composition when implanting to high doses. Migration occurs more rapidly toward the surface due to radiation damage effects. A separate plot displays the target growth due to swelling.