Company Overview

Quick Facts

  • Disk and Heat Sink Refurbishment for all Implanter Makes and Models
  • Now offering Silicon and Elastomer Coatings


Core Systems is a world leader in semiconductor ion implant outsourcing technology. We were founded in 1990 to provide embedded microcontrollers for ion implant equipment. These controllers enabled SECS communications, recipe management and remote monitoring for implanters as well as PVD systems. Hundreds of systems were installed worldwide. Shortly thereafter, Core Systems began to refurbish NV-10 implanter disks as another way to add value to legacy equipment. In 1998, Core furthered its involvement in ion implantation services when it acquired implanters for R&D and Specialty implant services. By 2002, with many companies clamoring for an alternative to their existing production implant provider, we increased our capabilities to twelve implanters and opened a Production implant service. Headquartered in Fremont, CA, we are proud to offer Disk Refurbishment and PVD Silicon Coating to a world-wide market .

Core Systems has the full capability to repair, refurbish and remanufacture any disk or heat sink. This includes all makes and models of batch processing ion implanters produced since the late 1970s to today. Core is the only provider of refurbishment services to support such a broad timeframe of implanter models and design changes. The objective of our custom support is to extend the life of implant equipment and to continuously lower the cost of ownership for the Integrated Device Manufacturers (IDMs). OEM disk designs are never obsolete at Core. We actively assess the field problems or life limited design issues to provide solutions and upgrades for our customers.
Because the wafer is implanted on the disk, the disk becomes part of the process. At Core, refurbishment provides global service that supports the implant process including qualification, installation, process testing, scheduled and unscheduled maintenance events, and end of life determination. Disks serviced by Core include:
· Axcelis/Eaton NV series
· Axcelis/Eaton GSD series (includes SEN SD series)
· Varian VIISion (and E1000) series
· Varian 80/12/160-10 and XP series
· Varian High Energy (Genus) 1500 and Kestrel series
·AMAT 9000 series (heat sinks/pedestals only)
The success of the ion implant process is largely predicated on achieving the highest levels of purity in both isotopic separation of the doping ions, and elimination of potential contaminates from the materials touching or sputtered on to the wafer.
Core offers over 35 engineered elastomers to meet the process requirements of the Integrated Device Manufacturers (IDMs). Elastomers are key to achieving full beam utilization or high beam current without limitations resulting from temperature, contamination and charge -up.
Silicon coatings were introduced in the mid 1990s to cover the Aluminum surfaces exposed to the ion beam. This prevented the sputtering of Aluminum and its contaminating, heavy metal alloying elements on to the wafer. Silicon coatings can extend the life of pre-silicon era disks such as the Varian XP series or Axcelis GSD disks.